Microscopic inspection of semiconductor wafer edges
A system that captures the edge of a rotated wafer with a line sensor to detect fine defects on the order of a few microns.
This is a system that captures the rotated wafer edge with a line sensor to detect fine defects on the order of a few microns. It can also handle massive images exceeding 1 GB.
- Company：横浜総合研究所
- Price：Other
